Modelling of Microfabrication Systems
BücherAngebote / Angebote:
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Lieferbar in ca. 20-45 Arbeitstagen