Metal Oxides for Non-volatile Memory
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Systematically covers metal oxides materials and their properties with memory technology applications including floating-gate memory, 3-D memory, memristors and much more Provides overview of most relevant deposition methods such as sputtering, CVD, ALD, and MBE Discusses design and fabrication of metal oxides for wide breadth of non-volatile memory applications from 3-D flash technology, transparent memory, and DRAM technology
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