Design of Micromechanical Devices

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Micromechanical devices are of great interest for a wide variety of applications, such as inertial sensing, biological/chemical sensing, projection display, biomedical imaging, and wireless communications. Design of Micromechanical Devices provides a comprehensive and in-depth description of the design and modeling of micromechanical devices from mechanical structural components, integrated transducers, to electromechanical system-level models upon which their interface circuits can be designed. TOC:Introduction to micromechanical devices.- Micromachining technology.- Continuum mechanics.- Motion of mechanical structures.- Transduction mechanisms.- Overview of electrical systems.- Electromechanical system-level models.- Experimental techniques and interface circuits.